P
PatentIndex
Search
Landscape
Sign in
Inventor
CHUANG HSI-TA
TW
2 patents
Patents
2 patents
US6352938B2
Mar 5, 2002
Method of removing photoresist and reducing native oxide in dual damascene copper process
UNITED MICROELECTRONICS CORP
25 citations
90
US6037206A
Mar 14, 2000
Method of fabricating a capacitor of a dynamic random access memory
UNITED MICROELECTRONICS CORP
29 citations
90