Inventor

BOETTCHER STEPHEN A

3 patents

Patents

3 patents

US4047639ASep 13, 1977

Abrasive slurry regulator assembly

SPEEDFAM CORP3 citations58

US3991918ANov 16, 1976

Abrasive slurry regulator assembly

SPEEDFAM CORP2 citations58

US4047640ASep 13, 1977

Abrasive slurry regulator assembly

SPEEDFAM CORP1 citations48