Inventor

KAY SARAH A

US2 patents

⚠️ This page may combine multiple inventors who share the name “KAY SARAH A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INTERNAITONAL BUSINESS MACHINE

1 patent

US7065425B1Jun 20, 2006

Metrology tool error log analysis methodology and system

INTERNAITONAL BUSINESS MACHINE11 citations80

IBM

1 patent

US7187993B2Mar 6, 2007

Metrology tool error log analysis methodology and system

IBM3 citations60