Inventor

STOVALL SCOTT C

US3 patents

Patents

3 patents

US7209055B1Apr 24, 2007

Electrostatic particle beam deflector

APPLIED MATERIALS INC10 citations80

US7417233B2Aug 26, 2008

Beam exposure correction system and method

APPLIED MATERIALS INC5 citations60

US7265361B2Sep 4, 2007

Beam blanker driver system and method

APPLIED MATERIALS INC2 citations55