Inventor

KALTENBRUNNER GUENTER

DE3 patents

⚠️ This page may combine multiple inventors who share the name “KALTENBRUNNER GUENTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG AST

1 patent

US5872889AFeb 16, 1999

Apparatus and method for rapid thermal processing

STEAG AST54 citations94

(unassigned)

1 patent

US5861609AJan 19, 1999

Method and apparatus for rapid thermal processing

118 citations94

AST ELECTRONIK

1 patent

US5837555ANov 17, 1998

Apparatus and method for rapid thermal processing

AST ELECTRONIK51 citations91