Inventor
LARSEN WILLA M
US5 patents
Patents
5 patentsUS7412767B2Aug 19, 2008
Microprobe tips and methods for making
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US7501328B2Mar 10, 2009
Methods for electrochemically fabricating structures using adhered masks, incorporating dielectric sheets, and/or seed layers that are partially removed via planarization
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US7363705B2Apr 29, 2008
Method of making a contact
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US7273812B2Sep 25, 2007
Microprobe tips and methods for making
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US7241689B2Jul 10, 2007
Microprobe tips and methods for making
MICROFABRICA INC13 citations84