Inventor
KAGEYAMA MOKUJI
JP10 patents
Patents
10 patentsUS5939770AAug 17, 1999
Semiconductor device and its manufacturing method
TOSHIBA KK75 citations95
US5271796ADec 21, 1993
Method and apparatus for detecting defect on semiconductor substrate surface
TOSHIBA KK83 citations93
US4990459AFeb 5, 1991
Impurity measuring method
TOSHIBA KK80 citations93
US6274505B1Aug 14, 2001
Etching method, etching apparatus and analyzing method
TOSHIBA KK19 citations92
US6037270AMar 14, 2000
Method of manufacturing semiconductor device and methods of processing, analyzing and manufacturing its substrate
TOSHIBA KK19 citations92
US6165872ADec 26, 2000
Semiconductor device and its manufacturing method
TOSHIBA KK12 citations73
US5574307ANov 12, 1996
Semiconductor device and method of producing the same
TOSHIBA KK9 citations73
US5395446AMar 7, 1995
Semiconductor treatment apparatus
TOSHIBA KK19 citations73
US5148457ASep 15, 1992
System for analyzing metal impurity on the surface of a single crystal semiconductor by using total reflection of x-rays fluorescence
TOSHIBA KK14 citations73
US5055413AOct 8, 1991
Method of measuring impurities in oxide films using a meltable sample collection stick
TOSHIBA KK5 citations60