Inventor

BEEKMAN KNUT

GB6 patents

⚠️ This page may combine multiple inventors who share the name “BEEKMAN KNUT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TRIKON EQUIP LTD

2 patents

US6544858B1Apr 8, 2003

Method for treating silicon-containing polymer layers with plasma or electromagnetic radiation

TRIKON EQUIP LTD92 citations93

US6242366B1Jun 5, 2001

Methods and apparatus for treating a semiconductor substrate

TRIKON EQUIP LTD50 citations89

TRIKON HOLDINGS LTD

2 patents

US6627535B2Sep 30, 2003

Methods and apparatus for forming a film on a substrate

TRIKON HOLDINGS LTD30 citations91

US6929831B2Aug 16, 2005

Methods of forming nitride films

TRIKON HOLDINGS LTD11 citations69

TRIKON TECHNOLOGIES LTD

2 patents

US6831010B2Dec 14, 2004

Method and depositing a layer

TRIKON TECHNOLOGIES LTD2 citations58

US6905962B2Jun 14, 2005

Method of depositing a layer

TRIKON TECHNOLOGIES LTD0 citations47