Inventor
SAMUELS DONALD JAMES
US3 patents
Patents
3 patentsUS5862058AJan 19, 1999
Optical proximity correction method and system
IBM105 citations95
US6034877AMar 7, 2000
Semiconductor memory array having sublithographic spacing between adjacement trenches and method for making the same
IBM15 citations72
US6190959B1Feb 20, 2001
Semiconductor memory array having sublithographic spacing between adjacent trenches and method for making the same
IBM5 citations61