Inventor
LIM KENG WENG
JP3 patents
Patents
3 patentsUS8808619B2Aug 19, 2014
Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber
KADOWAKI YUTAKA0 citations43
US8596216B2Dec 3, 2013
Method for the production of water-reactive Al film and constituent member for film-forming chamber
KADOWAKI YUTAKA1 citations43
US8715404B2May 6, 2014
Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber
KADOWAKI YUTAKA0 citations32