Inventor
TANGE HIDEO
JP2 patents
Patents
2 patentsUS11560336B2Jan 24, 2023
Method for producing semiconductor production device component, and semiconductor production device component
NGK SPARK PLUG CO0 citations48
US11142484B2Oct 12, 2021
Component for semiconductor production device, and production method of component for semiconductor production device
NGK SPARK PLUG CO0 citations48