Inventor
WILTSE MARK
US6 patents
⚠️ This page may combine multiple inventors who share the name “WILTSE MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6537011B1Mar 25, 2003
Method and apparatus for transferring and supporting a substrate
APPLIED MATERIALS INC68 citations93
US5893643AApr 13, 1999
Apparatus for measuring pedestal temperature in a semiconductor wafer processing system
APPLIED MATERIALS INC37 citations89
US5851926ADec 22, 1998
Method for etching transistor gates using a hardmask
APPLIED MATERIALS INC25 citations89