Inventor
YOKOYAMA KIYOSHI
JP11 patents
Patents
11 patentsUS7586734B2Sep 8, 2009
Electrostatic chuck
KYOCERA CORP14 citations82
US4746636AMay 24, 1988
Silicon nitride sintered body
KYOCERA CORP19 citations81
US4920085AApr 24, 1990
Silicon nitride sintered body and process for preparation thereof
KYOCERA CORP19 citations80
US4716133ADec 29, 1987
Method for production of silicon nitride sintered body
KYOCERA CORP20 citations78
US4892848AJan 9, 1990
Silicon nitride sintered body and process for preparation thereof
KYOCERA CORP12 citations73
US4891342AJan 2, 1990
Process for preparing a silicon nitride sintered body
KYOCERA CORP13 citations72
US5219500AJun 15, 1993
Silicon nitride sintered body and process for preparation thereof
KYOCERA CORP9 citations71
US4628039ADec 9, 1986
Sintered silicon nitride body
KYOCERA CORP19 citations70
US6414271B2Jul 2, 2002
Contact heating device
KYOCERA CORP11 citations67
US7381673B2Jun 3, 2008
Composite material, wafer holding member and method for manufacturing the same
KYOCERA CORP7 citations65
US7709099B2May 4, 2010
Bonded body, wafer support member using the same, and wafer treatment method
KYOCERA CORP6 citations61