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Inventor
YIM SUNGSOO
KR
2 patents
Patents
2 patents
US11616118B2
Mar 28, 2023
Integrated circuit semiconductor device
SAMSUNG ELECTRONICS CO LTD
0 citations
57
US11302698B2
Apr 12, 2022
Methods of forming a capacitor, semiconductor device, and fine pattern, and semiconductor device formed by the methods
SAMSUNG ELECTRONICS CO LTD
0 citations
42