Inventor
SATHOUD ORNELLA
US2 patents
Patents
2 patentsUS11691175B1Jul 4, 2023
Methods for area-selective deposition of polymer films using sequentially pulsed initiated chemical vapor deposition (spiCVD)
TOKYO ELECTRON LTD2 citations67
US12290835B2May 6, 2025
Methods for stabilization of self-assembled monolayers (SAMs) using sequentially pulsed initiated chemical vapor deposition (spiCVD)
TOKYO ELECTRON LTD1 citations58