Inventor
MOON JIN-OK
KR4 patents
Patents
4 patentsUS6334810B1Jan 1, 2002
Chemical mechanical polishing apparatus and method of using the same
SAMSUNG ELECTRONICS CO LTD23 citations84
US7101271B2Sep 5, 2006
Polishing head and chemical mechanical polishing apparatus
SAMSUNG ELECTRONICS CO LTD10 citations69
US6458023B1Oct 1, 2002
Multi characterized chemical mechanical polishing pad and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD13 citations69
US11541504B2Jan 3, 2023
Recycled polishing pad
SAMSUNG ELECTRONICS CO LTD0 citations55