Inventor
GLENN WALTER B
US4 patents
Patents
4 patentsUS6932871B2Aug 23, 2005
Multi-station deposition apparatus and method
APPLIED MATERIALS INC78 citations96
US7547465B2Jun 16, 2009
Multi-station deposition apparatus and method
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US7923069B2Apr 12, 2011
Multi-station deposition apparatus and method
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US7794789B2Sep 14, 2010
Multi-station deposition apparatus and method
APPLIED MATERIALS INC0 citations51