Inventor
LOEWENSTEIN LEE M
US35 patents
⚠️ This page may combine multiple inventors who share the name “LOEWENSTEIN LEE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
34 patentsUS6110838AAug 29, 2000
Isotropic polysilicon plus nitride stripping
TEXAS INSTRUMENTS INC232 citations99
US5002632AMar 26, 1991
Method and apparatus for etching semiconductor materials
TEXAS INSTRUMENTS INC473 citations99
US4904621AFeb 27, 1990
Remote plasma generation process using a two-stage showerhead
TEXAS INSTRUMENTS INC287 citations99
US4886570ADec 12, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC160 citations99
US4867841ASep 19, 1989
Method for etch of polysilicon film
TEXAS INSTRUMENTS INC141 citations99
US4857140AAug 15, 1989
Method for etching silicon nitride
TEXAS INSTRUMENTS INC252 citations99
US4828649AMay 9, 1989
Method for etching an aluminum film doped with silicon
TEXAS INSTRUMENTS INC176 citations99
US4820377AApr 11, 1989
Method for cleanup processing chamber and vacuum process module
TEXAS INSTRUMENTS INC334 citations99
US5248636ASep 28, 1993
Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation
TEXAS INSTRUMENTS INC86 citations96
US5138973AAug 18, 1992
Wafer processing apparatus having independently controllable energy sources
TEXAS INSTRUMENTS INC108 citations96
US4878994ANov 7, 1989
Method for etching titanium nitride local interconnects
TEXAS INSTRUMENTS INC124 citations96
US4842686AJun 27, 1989
Wafer processing apparatus and method
TEXAS INSTRUMENTS INC54 citations96
US4822450AApr 18, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC56 citations96
US4818326AApr 4, 1989
Processing apparatus
TEXAS INSTRUMENTS INC124 citations96
US4836905AJun 6, 1989
Processing apparatus
TEXAS INSTRUMENTS INC117 citations94
US6114741ASep 5, 2000
Trench isolation of a CMOS structure
TEXAS INSTRUMENTS INC29 citations93
US5741396AApr 21, 1998
Isotropic nitride stripping
TEXAS INSTRUMENTS INC42 citations93
US5437765AAug 1, 1995
Semiconductor processing
TEXAS INSTRUMENTS INC32 citations93
US4875989AOct 24, 1989
Wafer processing apparatus
TEXAS INSTRUMENTS INC57 citations93
US4906328AMar 6, 1990
Method for wafer treating
TEXAS INSTRUMENTS INC42 citations92
US4882008ANov 21, 1989
Dry development of photoresist
TEXAS INSTRUMENTS INC48 citations92
US4988644AJan 29, 1991
Method for etching semiconductor materials using a remote plasma generator
TEXAS INSTRUMENTS INC48 citations91
US4872938AOct 10, 1989
Processing apparatus
TEXAS INSTRUMENTS INC51 citations91
US5102231AApr 7, 1992
Semiconductor wafer temperature measurement system and method
TEXAS INSTRUMENTS INC48 citations89
US4855016AAug 8, 1989
Method for etching aluminum film doped with copper
TEXAS INSTRUMENTS INC21 citations82
US4844773AJul 4, 1989
Process for etching silicon nitride film
TEXAS INSTRUMENTS INC20 citations82
US4842676AJun 27, 1989
Process for etch of tungsten
TEXAS INSTRUMENTS INC19 citations82
US7732225B2Jun 8, 2010
Method for measuring contamination in liquids at PPQ levels
TEXAS INSTRUMENTS INC11 citations79
US6180491B1Jan 30, 2001
Isolation structure and method
TEXAS INSTRUMENTS INC6 citations74
US4838984AJun 13, 1989
Method for etching films of mercury-cadmium-telluride and zinc sulfid
TEXAS INSTRUMENTS INC11 citations74
US4830705AMay 16, 1989
Method for etch of GaAs
TEXAS INSTRUMENTS INC17 citations74
US4820378AApr 11, 1989
Process for etching silicon nitride selectively to silicon oxide
TEXAS INSTRUMENTS INC9 citations74
US5268067ADec 7, 1993
Wafer clamping method
TEXAS INSTRUMENTS INC12 citations72
US5101764AApr 7, 1992
Method and apparatus for integrating optical sensor into processor
TEXAS INSTRUMENTS INC6 citations59