Inventor
FISHER WAYNE G
US6 patents
Patents
6 patentsUS4879258ANov 7, 1989
Integrated circuit planarization by mechanical polishing
TEXAS INSTRUMENTS INC152 citations96
US4830700AMay 16, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC37 citations92
US4832779AMay 23, 1989
Processing apparatus
TEXAS INSTRUMENTS INC31 citations91
US4777804AOct 18, 1988
Method and apparatus for easing surface particle removal by size increase
TEXAS INSTRUMENTS INC31 citations90
US5102231AApr 7, 1992
Semiconductor wafer temperature measurement system and method
TEXAS INSTRUMENTS INC48 citations89
US4857132AAug 15, 1989
Processing apparatus for wafers
TEXAS INSTRUMENTS INC10 citations71