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Inventor
KOSHTI SUSHANT SURESH
US
2 patents
Patents
2 patents
US11169547B2
Nov 9, 2021
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC
2 citations
70
US11520358B2
Dec 6, 2022
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC
0 citations
59