Inventor

HENRY JAMES MATTHEW

US3 patents

⚠️ This page may combine multiple inventors who share the name “HENRY JAMES MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIR PROD & CHEM

1 patent

US8999193B2Apr 7, 2015

Chemical mechanical polishing composition having chemical additives and methods for using same

AIR PROD & CHEM10 citations79

VERSUM MAT US LLC

1 patent

US11111415B2Sep 7, 2021

Chemical mechanical planarization of films comprising elemental silicon

VERSUM MAT US LLC0 citations49

HENRY JAMES MATTHEW

1 patent

US8916473B2Dec 23, 2014

Method for forming through-base wafer vias for fabrication of stacked devices

HENRY JAMES MATTHEW0 citations28