Inventor

JUNG CHAN-OUK

KR5 patents

⚠️ This page may combine multiple inventors who share the name “JUNG CHAN-OUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

4 patents

US5903351AMay 11, 1999

Method and apparatus for selective spectroscopic analysis of a wafer surface and gas phase elements in a reaction chamber

SAMSUNG ELECTRONICS CO LTD29 citations92

US6177320B1Jan 23, 2001

Method for forming a self aligned contact in a semiconductor device

SAMSUNG ELECTRONICS CO LTD50 citations91

US6159811ADec 12, 2000

Methods for patterning microelectronic structures using chlorine, oxygen, and fluorine

SAMSUNG ELECTRONICS CO LTD14 citations72

US6087264AJul 11, 2000

Methods for patterning microelectronic structures using chlorine and oxygen

SAMSUNG ELECTRONICS CO LTD6 citations61

(unassigned)

1 patent

US6770567B2Aug 3, 2004

Method of reducing particulates in a plasma etch chamber during a metal etch process