Inventor
FINKBEINER STEFAN
DE7 patents
⚠️ This page may combine multiple inventors who share the name “FINKBEINER STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
5 patentsUS7354786B2Apr 8, 2008
Sensor element with trenched cavity
BOSCH GMBH ROBERT27 citations91
US7740459B2Jun 22, 2010
Micropump having a pump diaphragm and a polysilicon layer
BOSCH GMBH ROBERT6 citations61
US7572660B2Aug 11, 2009
Electrical through-plating of semiconductor chips
BOSCH GMBH ROBERT6 citations61
US6511913B1Jan 28, 2003
Method for manufacturing a membrane
BOSCH GMBH ROBERT4 citations61
US7572661B2Aug 11, 2009
Method for manufacturing a micromechanical sensor element
BOSCH GMBH ROBERT0 citations40