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Inventor
RUZIC DAVID
US
3 patents
⚠️ This page may combine multiple inventors who share the name “RUZIC DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
2 patents
US7230258B2
Jun 12, 2007
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
INTEL CORP
54 citations
94
US7652272B2
Jan 26, 2010
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
INTEL CORP
11 citations
82
NOVELLUS SYSTEMS INC
1 patent
US6841044B1
Jan 11, 2005
Chemically-enhanced physical vapor deposition
NOVELLUS SYSTEMS INC
50 citations
88