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Inventor
SOEMERS HERMAN
NL
3 patents
⚠️ This page may combine multiple inventors who share the name “SOEMERS HERMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
2 patents
US7604359B2
Oct 20, 2009
High positioning reproducible low torque mirror-actuator interface
ZEISS CARL SMT AG
3 citations
56
US7699480B2
Apr 20, 2010
High positioning reproducible low torque mirror-actuator interface
ZEISS CARL SMT AG
0 citations
45
ZEISS CARL SMT GMBH
1 patent
US8018664B2
Sep 13, 2011
Housing structure
ZEISS CARL SMT GMBH
1 citations
43