Inventor
SHIN JOONGHAN
KR3 patents
Patents
3 patentsUS9443932B2Sep 13, 2016
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US10269594B2Apr 23, 2019
Transparent plate and substrate processing system therewith
SAMSUNG ELECTRONICS CO LTD0 citations47
US9728666B2Aug 8, 2017
Semiconductor device and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations32