Inventor
MIN YOUNG-MIN
KR8 patents
⚠️ This page may combine multiple inventors who share the name “MIN YOUNG-MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS7578944B2Aug 25, 2009
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD23 citations91
US7193369B2Mar 20, 2007
Method for generating gas plasma
SAMSUNG ELECTRONICS CO LTD30 citations91
US6684652B2Feb 3, 2004
Method of and an apparatus for regulating the temperature of an electrostatic chuck
SAMSUNG ELECTRONICS CO LTD22 citations90
US6202590B1Mar 20, 2001
Plasma apparatus for fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD16 citations79
US6816029B2Nov 9, 2004
RF matching unit
SAMSUNG ELECTRONICS CO LTD9 citations73
US7764483B2Jul 27, 2010
Semiconductor etching apparatus
SAMSUNG ELECTRONICS CO LTD4 citations62
US6824617B2Nov 30, 2004
Input/output valve switching apparatus of semiconductor manufacturing system
SAMSUNG ELECTRONICS CO LTD0 citations50