Inventor
SEURING CHRISTOPH
DE3 patents
Patents
3 patentsUS6803331B2Oct 12, 2004
Process for the heat treatment of a silicon wafer, and silicon wafer produced
SILTRONIC AG13 citations81
US7537657B2May 26, 2009
Silicon wafer and process for producing it
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US7235863B2Jun 26, 2007
Silicon wafer and process for producing it
SILTRONIC AG0 citations49