P

Inventor

NOZUE HIROSHI

JP22 patents
⚠️ This page may combine multiple inventors who share the name “NOZUE HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC CORP

14 patents
US5968686AOct 19, 1999

Charged-beam exposure mask and charged-beam exposure method

NEC CORP22 citations92
US5808310ASep 15, 1998

Electron beam cell projection lithography method for correcting coulomb interaction effects

NEC CORP39 citations92
US5452053ASep 19, 1995

Wafer stepper

NEC CORP25 citations92
US5677109AOct 14, 1997

Method for E-beam writing

NEC CORP7 citations73
US5607801AMar 4, 1997

Direct patterning method of resist film using electron beam

NEC CORP12 citations73
US5439765AAug 8, 1995

Photomask for semiconductor integrated circuit device

NEC CORP13 citations73
US5432587AJul 11, 1995

Exposing device capable of making clear pattern image on photo resist layer having different level surfaces

NEC CORP12 citations73
US4791302ADec 13, 1988

Semiconductor wafer for providing a plurality of semiconductor chips through electron-beam lithography

NEC CORP14 citations73
US5532497AJul 2, 1996

Optical aligner equipped with luminance sensor on movable stage

NEC CORP12 citations71
US6042971AMar 28, 2000

Method of manufacturing an EB mask for electron beam image drawing and device for manufacturing an EB mask

NEC CORP3 citations63
US6034375AMar 7, 2000

Method of aligning a semiconductor substrate with a base stage and apparatus for doing the same

NEC CORP3 citations62
US5759722AJun 2, 1998

Electron beam aperture structure and method for fabricating the same

NEC CORP4 citations62
US5677756AOct 14, 1997

Apparatus for exposing a semiconductor wafer to light including an illumination optical system comprising a glass substrate having light-permeable patterns

NEC CORP2 citations62
US5552250ASep 3, 1996

Method of manufacturing reticle

NEC CORP6 citations62

TOSHIBA KK

3 patents

KUNIMATSU ATSUSHI

1 patent

TOSHIBA MEMORY CORP

1 patent

KURABE IND CO LTD

1 patent

ABE TAKAYUKI

1 patent

DAINIPPON PRINTING CO LTD

1 patent