Inventor
NOZUE HIROSHI
JP22 patents
⚠️ This page may combine multiple inventors who share the name “NOZUE HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
14 patentsUS5968686AOct 19, 1999
Charged-beam exposure mask and charged-beam exposure method
NEC CORP22 citations92
US5808310ASep 15, 1998
Electron beam cell projection lithography method for correcting coulomb interaction effects
NEC CORP39 citations92
US5452053ASep 19, 1995
Wafer stepper
NEC CORP25 citations92
US5677109AOct 14, 1997
Method for E-beam writing
NEC CORP7 citations73
US5607801AMar 4, 1997
Direct patterning method of resist film using electron beam
NEC CORP12 citations73
US5439765AAug 8, 1995
Photomask for semiconductor integrated circuit device
NEC CORP13 citations73
US5432587AJul 11, 1995
Exposing device capable of making clear pattern image on photo resist layer having different level surfaces
NEC CORP12 citations73
US4791302ADec 13, 1988
Semiconductor wafer for providing a plurality of semiconductor chips through electron-beam lithography
NEC CORP14 citations73
US5532497AJul 2, 1996
Optical aligner equipped with luminance sensor on movable stage
NEC CORP12 citations71
US6042971AMar 28, 2000
Method of manufacturing an EB mask for electron beam image drawing and device for manufacturing an EB mask
NEC CORP3 citations63
US6034375AMar 7, 2000
Method of aligning a semiconductor substrate with a base stage and apparatus for doing the same
NEC CORP3 citations62
US5759722AJun 2, 1998
Electron beam aperture structure and method for fabricating the same
NEC CORP4 citations62
US5677756AOct 14, 1997
Apparatus for exposing a semiconductor wafer to light including an illumination optical system comprising a glass substrate having light-permeable patterns
NEC CORP2 citations62
US5552250ASep 3, 1996
Method of manufacturing reticle
NEC CORP6 citations62
TOSHIBA KK
3 patentsUS5890189AMar 30, 1999
Memory management and protection system for virtual memory in computer system
TOSHIBA KK283 citations98
US5627987AMay 6, 1997
Memory management and protection system for virtual memory in computer system
TOSHIBA KK78 citations95
US5745730AApr 28, 1998
Apparatus and methods for implementing dedicated cache flushing
TOSHIBA KK26 citations92