Inventor
CHENG WEI HUA
SG9 patents
⚠️ This page may combine multiple inventors who share the name “CHENG WEI HUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
8 patentsUS7067869B2Jun 27, 2006
Adjustable 3D capacitor
CHARTERED SEMICONDUCTOR MFG23 citations92
US6630380B1Oct 7, 2003
Method for making three-dimensional metal-insulator-metal capacitors for dynamic random access memory (DRAM) and ferroelectric random access memory (FERAM)
CHARTERED SEMICONDUCTOR MFG44 citations92
US5743138AApr 28, 1998
Spirally fluted float
CHARTERED SEMICONDUCTOR MFG33 citations91
US6689643B2Feb 10, 2004
Adjustable 3D capacitor
CHARTERED SEMICONDUCTOR MFG7 citations73
US6713335B2Mar 30, 2004
Method of self-aligning a damascene gate structure to isolation regions
CHARTERED SEMICONDUCTOR MFG11 citations66
US5980186ANov 9, 1999
Fork cover for vertical furnace
CHARTERED SEMICONDUCTOR MFG3 citations61
US6803305B2Oct 12, 2004
Method for forming a via in a damascene process
CHARTERED SEMICONDUCTOR MFG4 citations60
US6686279B2Feb 3, 2004
Method for reducing gouging during via formation
CHARTERED SEMICONDUCTOR MFG4 citations58