Inventor

LORD DAVID K

US3 patents

Patents

3 patents

US5185294AFeb 9, 1993

Boron out-diffused surface strap process

IBM42 citations92

US5545583AAug 13, 1996

Method of making semiconductor trench capacitor cell having a buried strap

IBM28 citations89

US5770876AJun 23, 1998

Semiconductor trench capacitor cell having a buried strap

IBM16 citations79