Inventor
WRIGHT JUDITH A
US3 patents
Patents
3 patentsUS5545583AAug 13, 1996
Method of making semiconductor trench capacitor cell having a buried strap
IBM28 citations89
US7479447B2Jan 20, 2009
Method of forming a crack stop void in a low-k dielectric layer between adjacent fuses
IBM10 citations83
US5770876AJun 23, 1998
Semiconductor trench capacitor cell having a buried strap
IBM16 citations79