Inventor
HOLLISTER ALICE
US4 patents
⚠️ This page may combine multiple inventors who share the name “HOLLISTER ALICE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS9337068B2May 10, 2016
Oxygen-containing ceramic hard masks and associated wet-cleans
LAM RES CORP13 citations82
US9520295B2Dec 13, 2016
Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems
LAM RES CORP6 citations70
US10242848B2Mar 26, 2019
Carrier ring structure and chamber systems including the same
LAM RES CORP5 citations66