Inventor
APELGREN ERIC M
US10 patents
⚠️ This page may combine multiple inventors who share the name “APELGREN ERIC M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
9 patentsUS6261963B1Jul 17, 2001
Reverse electroplating of barrier metal layer to improve electromigration performance in copper interconnect devices
ADVANCED MICRO DEVICES INC62 citations95
US6610594B2Aug 26, 2003
Locally increasing sidewall density by ion implantation
ADVANCED MICRO DEVICES INC20 citations91
US6500755B2Dec 31, 2002
Resist trim process to define small openings in dielectric layers
ADVANCED MICRO DEVICES INC18 citations91
US6514844B1Feb 4, 2003
Sidewall treatment for low dielectric constant (low K) materials by ion implantation
ADVANCED MICRO DEVICES INC21 citations90
US6315637B1Nov 13, 2001
Photoresist removal using a polishing tool
ADVANCED MICRO DEVICES INC11 citations73
US6406993B1Jun 18, 2002
Method of defining small openings in dielectric layers
ADVANCED MICRO DEVICES INC7 citations72
US5780861AJul 14, 1998
Adjustable blade reticle assembly
ADVANCED MICRO DEVICES INC9 citations69
US6313538B1Nov 6, 2001
Semiconductor device with partial passivation layer
ADVANCED MICRO DEVICES INC4 citations62
US5848382ADec 8, 1998
Method for automated energy dose measurement and adjustment for a photoaligner
ADVANCED MICRO DEVICES INC2 citations61