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Inventor
PARK WANJAE
US
4 patents
⚠️ This page may combine multiple inventors who share the name “PARK WANJAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patents
US10460963B2
Oct 29, 2019
Plasma processing method
TOKYO ELECTRON LTD
1 citations
61
US11243465B2
Feb 8, 2022
Plasma treatment method to enhance surface adhesion for lithography
TOKYO ELECTRON LTD
0 citations
49
US10460988B2
Oct 29, 2019
Removal method and processing method
TOKYO ELECTRON LTD
0 citations
39
SAMSUNG ELECTRONICS CO LTD
1 patent
US7816271B2
Oct 19, 2010
Methods for forming contacts for dual stress liner CMOS semiconductor devices
SAMSUNG ELECTRONICS CO LTD
6 citations
61