Inventor
TAKEGAWA KAZUYUKI
JP2 patents
Patents
2 patentsUS6995915B2Feb 7, 2006
Manufacturing method of micro-lens, manufacturing method of solid-state image pickup device and solid-state image pickup device
SANYO ELECTRIC CO2 citations60
US7459327B2Dec 2, 2008
Method for manufacturing micro lenses including underlayer film and lens film etching steps
SANYO ELECTRIC CO3 citations58