Inventor
YABE HIDEKI
JP11 patents
Patents
11 patentsUS6265113B1Jul 24, 2001
Stress adjustment method of X-ray mask
MITSUBISHI ELECTRIC CORP344 citations97
US6110291AAug 29, 2000
Thin film forming apparatus using laser
MITSUBISHI ELECTRIC CORP67 citations94
US5677090AOct 14, 1997
Method of making X-ray mask having reduced stress
MITSUBISHI ELECTRIC CORP20 citations91
US5905005AMay 18, 1999
X-ray mask and method of fabricating the same
MITSUBISHI ELECTRIC CORP7 citations72
US5496667AMar 5, 1996
X-ray mask and its fabrication method
MITSUBISHI ELECTRIC CORP7 citations72
US5953492ASep 14, 1999
Method of manufacturing X-ray mask and heating apparatus
MITSUBISHI ELECTRIC CORP6 citations71
US6212252B1Apr 3, 2001
X-ray mask provided with an alignment mark and method of manufacturing the same
MITSUBISHI ELECTRIC CORP13 citations70
US7350406B2Apr 1, 2008
Sensor chip breaking strength inspection apparatus and sensor chip breaking strength inspection method
MITSUBISHI ELECTRIC CORP4 citations60
US6898267B2May 24, 2005
X-ray mask
MITSUBISHI ELECTRIC CORP5 citations60
US5834142ANov 10, 1998
Method of manufacturing X-ray mask and heating apparatus
MITSUBISHI ELECTRIC CORP3 citations60
US5879840AMar 9, 1999
Film-forming method for X-ray mask
MITSUBISHI ELECTRIC CORP3 citations59