Inventor
KITAMURA KAEKO
JP4 patents
Patents
4 patentsUS6265113B1Jul 24, 2001
Stress adjustment method of X-ray mask
MITSUBISHI ELECTRIC CORP344 citations97
US5905005AMay 18, 1999
X-ray mask and method of fabricating the same
MITSUBISHI ELECTRIC CORP7 citations72
US6212252B1Apr 3, 2001
X-ray mask provided with an alignment mark and method of manufacturing the same
MITSUBISHI ELECTRIC CORP13 citations70
US5879840AMar 9, 1999
Film-forming method for X-ray mask
MITSUBISHI ELECTRIC CORP3 citations59