Inventor
WARREN RONALD A
US24 patents
⚠️ This page may combine multiple inventors who share the name “WARREN RONALD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
22 patentsUS5166096ANov 24, 1992
Process for fabricating self-aligned contact studs for semiconductor structures
IBM431 citations98
US5427622AJun 27, 1995
Method for uniform cleaning of wafers using megasonic energy
IBM64 citations96
US5216282AJun 1, 1993
Self-aligned contact studs for semiconductor structures
IBM62 citations96
US5441797AAug 15, 1995
Antireflective polyimide dielectric for photolithography
IBM36 citations95
US5397684AMar 14, 1995
Antireflective polyimide dielectric for photolithography
IBM38 citations95
US5947053ASep 7, 1999
Wear-through detector for multilayered parts and methods of using same
IBM91 citations94
US6105274AAug 22, 2000
Cryogenic/phase change cooling for rapid thermal process systems
IBM24 citations93
US6282459B1Aug 28, 2001
Structure and method for detection of physical interference during transport of an article
IBM37 citations92
US6036821AMar 14, 2000
Enhanced collimated sputtering apparatus and its method of use
IBM38 citations92
US5943594AAug 24, 1999
Method for extended ion implanter source lifetime with control mechanism
IBM43 citations92
US5940724AAug 17, 1999
Method for extended ion implanter source lifetime
IBM30 citations92
US5579792ADec 3, 1996
Apparatus for uniform cleaning of wafers using megasonic energy
IBM32 citations92
US5533540AJul 9, 1996
Apparatus for uniform cleaning of wafers using megasonic energy
IBM37 citations92
US5187121AFeb 16, 1993
Process for fabrication of a semiconductor structure and contact stud
IBM27 citations92
US5982225ANov 9, 1999
Hot electron compensation for improved MOS transistor reliability
IBM18 citations89
US5536792AJul 16, 1996
Antireflective polymide dielectric for photolithography
IBM12 citations81
US5539080AJul 23, 1996
Polyimide and a semiconductor prepared therefrom
IBM6 citations73
US5352927AOct 4, 1994
Self-aligned contact studs for semiconductor structures
IBM10 citations73
US6580140B1Jun 17, 2003
Metal oxide temperature monitor
IBM6 citations72
US7332054B2Feb 19, 2008
Etch apparatus
IBM8 citations71
US6339022B1Jan 15, 2002
Method of annealing copper metallurgy
IBM6 citations59
US6759260B2Jul 6, 2004
Metal oxide temperature monitor
IBM0 citations50