Inventor
LI MENG-HSIEN
TW4 patents
Patents
4 patentsUS12046476B2Jul 23, 2024
Wet etching chemistry and method of forming semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12557577B2Feb 17, 2026
Method of forming semiconductor device using wet etching chemistry
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12494432B2Dec 9, 2025
Semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US10770314B2Sep 8, 2020
Semiconductor device, tool, and method of manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37