Inventor

KITAZAWA ATSUO

JP3 patents

Patents

3 patents

US6110285AAug 29, 2000

Vertical wafer boat

TOSHIBA CERAMICS CO54 citations94

US5492229AFeb 20, 1996

Vertical boat and a method for making the same

TOSHIBA CERAMICS CO82 citations94

US6093644AJul 25, 2000

Jig for semiconductor wafers and method for producing the same

TOSHIBA CERAMICS CO41 citations90