Inventor
EGOROV EUGENI E
RU4 patents
⚠️ This page may combine multiple inventors who share the name “EGOROV EUGENI E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
3 patentsUS7039896B2May 2, 2006
Gradient method of mask edge correction
LSI LOGIC CORP18 citations79
US6934410B1Aug 23, 2005
Mask correction for photolithographic processes
LSI LOGIC CORP13 citations79
US6988260B2Jan 17, 2006
Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes
LSI LOGIC CORP0 citations48