Inventor
WEE KOH YEE
MY2 patents
Patents
2 patentsUS7052932B2May 30, 2006
Oxygen doped SiC for Cu barrier and etch stop layer in dual damascene fabrication
CHARTERED SEMICONDUCTOR MFG28 citations90
US7538353B2May 26, 2009
Composite barrier/etch stop layer comprising oxygen doped SiC and SiC for interconnect structures
CHARTERED SEMICONDUCTOR MFG11 citations81