Inventor

TSAI MEI-HUI

TW2 patents

⚠️ This page may combine multiple inventors who share the name “TSAI MEI-HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US11145521B2Oct 12, 2021

Method for cleaning a semiconductor substrate

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52

LU HSU-TUNG

1 patent

US8992873B2Mar 31, 2015

Hollow silica particles and method for producing the same

LU HSU-TUNG0 citations32