Inventor

BEARDSLEY GARY JOSEPH

US3 patents

Patents

3 patents

US6352596B2Mar 5, 2002

Post CMP cleaning method using a brush cleaner with torque monitor

IBM27 citations89

US6269510B1Aug 7, 2001

Post CMP clean brush with torque monitor

IBM31 citations89

US6179693B1Jan 30, 2001

In-situ/self-propelled polishing pad conditioner and cleaner

IBM44 citations89