Inventor

VENKATARANAN SHANKAR

US2 patents

Patents

2 patents

US6599574B1Jul 29, 2003

Method and apparatus for forming a dielectric film using helium as a carrier gas

APPLIED MATERIALS INC25 citations91

US6300255B1Oct 9, 2001

Method and apparatus for processing semiconductive wafers

APPLIED MATERIALS INC40 citations91