Inventor
SHMURUN INNA
US13 patents
⚠️ This page may combine multiple inventors who share the name “SHMURUN INNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS7500445B2Mar 10, 2009
Method and apparatus for cleaning a CVD chamber
APPLIED MATERIALS INC187 citations98
US6946033B2Sep 20, 2005
Heated gas distribution plate for a processing chamber
APPLIED MATERIALS INC227 citations98
US6645303B2Nov 11, 2003
Heater/lift assembly for high temperature processing chamber
APPLIED MATERIALS INC75 citations97
US6019848AFeb 1, 2000
Lid assembly for high temperature processing chamber
APPLIED MATERIALS INC212 citations97
US6495233B1Dec 17, 2002
Apparatus for distributing gases in a chemical vapor deposition system
APPLIED MATERIALS INC77 citations93
US7909595B2Mar 22, 2011
Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections
APPLIED MATERIALS INC18 citations92
US6506994B2Jan 14, 2003
Low profile thick film heaters in multi-slot bake chamber
APPLIED MATERIALS INC22 citations92
US6300255B1Oct 9, 2001
Method and apparatus for processing semiconductive wafers
APPLIED MATERIALS INC40 citations91
US7628863B2Dec 8, 2009
Heated gas box for PECVD applications
APPLIED MATERIALS INC20 citations90
US7464717B2Dec 16, 2008
Method for cleaning a CVD chamber
APPLIED MATERIALS INC8 citations72
US7654224B2Feb 2, 2010
Method and apparatus for cleaning a CVD chamber
APPLIED MATERIALS INC1 citations61
US7465357B2Dec 16, 2008
Computer-readable medium that contains software for executing a method for cleaning a CVD chamber
APPLIED MATERIALS INC0 citations51