Inventor
TSAN CHUN-CHING
TW8 patents
Patents
8 patentsUS6136680AOct 24, 2000
Methods to improve copper-fluorinated silica glass interconnects
TAIWAN SEMICONDUCTOR MFG133 citations97
US6407007B1Jun 18, 2002
Method to solve the delamination of a silicon nitride layer from an underlying spin on glass layer
TAIWAN SEMICONDUCTOR MFG21 citations92
US6399522B1Jun 4, 2002
PE-silane oxide particle performance improvement
TAIWAN SEMICONDUCTOR MFG37 citations92
US6268274B1Jul 31, 2001
Low temperature process for forming inter-metal gap-filling insulating layers in silicon wafer integrated circuitry
TAIWAN SEMICONDUCTOR MFG19 citations92
US6584987B1Jul 1, 2003
Method for improved cleaning in HDP-CVD process with reduced NF3 usage
TAIWAN SEMICONDUCTOR MFG31 citations90
US6586347B1Jul 1, 2003
Method and structure to improve the reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and metal layers in semiconductor integrated circuits
TAIWAN SEMICONDUCTOR MFG16 citations83
US6479881B2Nov 12, 2002
Low temperature process for forming intermetal gap-filling insulating layers in silicon wafer integrated circuitry
TAIWAN SEMICONDUCTOR MFG6 citations73
US6323141B1Nov 27, 2001
Method for forming anti-reflective coating layer with enhanced film thickness uniformity
TAIWAN SEMICONDUCTOR MFG5 citations58