Inventor
MATTSON DAVID P
US2 patents
Patents
2 patentsUS7198694B2Apr 3, 2007
Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems
SEMITOOL INC16 citations81
US7313462B2Dec 25, 2007
Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces
SEMITOOL INC8 citations70