Inventor

TACHIKAWA YUICHI

JP2 patents

Patents

2 patents

US7640142B2Dec 29, 2009

Position measurement apparatus and method and pattern forming apparatus and writing method

NUFLARE TECHNOLOGY INC550 citations94

US7608528B2Oct 27, 2009

Substrate cover, and charged particle beam writing apparatus and method

NUFLARE TECHNOLOGY INC8 citations78